Dissolved Ozone Analyzers

100 Morse Street
Norwood, MA 02062, USA
Toll free: 1-800-798-4029
Phone: (1) 781-444-2929
Fax: (1) 781-444-9229
E-mail: info@inusacorp.com

For Semiconductor Applications

The three different models of Dissolved Ozone Sensors for semiconductor processes all incorporate IN USA’s patented, dual-optical path sample-sensing technology to provide unparalleled ozone detection and measurement in any application.

Ozone in DI Water:
dffoz

The Model dFFOZ is a state-of-the-art Dissolved Ozone Sensor designed for Semiconductor Wet Bench applications. It is ideally suited for in-situ, in-line continuous measurements of dissolved ozone in de-ionized water with a standard range as high as 150 mg/L. It is “clean ready” for high purity semiconductor processes, and can be installed in-line at flow rates as high as 150 slpm. It is packaged in a compact FRPP enclosure with a Teflon jacketed interconnect cable.

Ozone in Sulfuric:
dffoz

The Model dFFOZ-S (Sulfuric) is a state-of-the-art Dissolved Ozone Sensor designed for Semiconductor Sulfuric / Piranha Wet Bench applications. It is ideally suited for in-situ, in-line continuous measurements of dissolved ozone in Sulfuric acid (as high as 98%) with a standard range of 150 mg/L. It is “clean ready” for high purity semiconductor processes, and can be installed in-line at flow rates as high as 150 slpm at high temperatures (up to 140°C). It is packaged in a compact FRPP enclosure with a Teflon jacketed interconnect cable.

Ozone for Ultrapure Water:
dffoz

The Model dFFOZ-TR (Trace) is designed to accurately read and measure low concentrations of dissolved ozone at the ppb level. This sensor is best suited for continuous measurements and is typically used in applications where bacteria must be eliminated in the facility water of a semiconductor fab. Another critical use is ozone measurement to ensure zero ozone in facility water flowing downstream of a UV ozone destruct system.

Features:

		No moving parts
		No consumables
		High accuracy UV Absorption method

		No regular maintenance
		Compact FRPP enclosure
		Teflon jacketed interconnect cable

For more information on IN USA's dissolved ozone analyzers, please complete our Information Request Form, or contact IN USA via e-mail or phone.