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H High Concentration Process Ozone Analyzers
IN USA, Inc. has introduced the Series H, a line of continuous,
on-line ozone analyzers designed specifically to measure high
concentrations of process ozone up to 400 g/Nm3 (grams
per Normal cubic meter), equivalent to 900g/m3 (grams
per cubic meter) or 26% w/w (per cent by weight) at sample pressures
of 2.5 atmospheres.
Ozone is now being used in a wide variety of semiconductor processes,
including CVD TEOS/Ozone; Dry Ashing; Wet Bench Cleaning (using
ozone as a replacement for H2O2);
and Ultrapure Water (using ozone or UV/ozone). The Series H is
ideal for measuring ozone generator output and performance, determining
ozone production, monitoring ozone off-gas at the contactor exhaust,
and providing automatic control of ozone processes and equipment.
The Series H combines an innovative single-beam UV (ultraviolet)
sensor design, continuous sample flow, automatic pressure and
temperature compensation, extended measuring range, microprocessor-based
measurement and control circuitry, and numerous other features
to achieve a level of performance that sets a new industry standard
for high-concentration process ozone measurement.
The Series H UV absorption cell makes an absolute measurement
of ozone concentration that is ozone specific and is not affected
by background contaminants in the sample gas. Unlike prism-based
optical technologies, the Series H uses a single-beam optical
system with no solenoid valves or wetted moving parts. The single-beam
optical system provides high reliability and drift-free performance.
It also allows an uninterrupted flow of sample gas, which results
in faster speed of response and permits in-line ozone measurement
at high pressure with no back-pressure loading on the ozone generator.
For process ozone measurement, changes in the pressure or temperature
of the sample gas can have significant effects on the accuracy
of the reading. The Series H can be configured with pressure and
temperature sensors to provide continuous, on-line compensation
for variations in sample pressure between 1 and 2 atmospheres,
temperature, and molecular weight. This gives the ozone measurement
independence from varying process conditions, provides true %
w/w measurement capability, and provides the Series H with a 5-10%
increase in accuracy versus analyzers that only measure ambient
or atmospheric pressure.
The Series H is designed for versatility and ease of use in a
wide variety of installations. Standard features include an alphanumeric
vacuum fluorescent display, 0-10 VDC and 4-20 mA analog outputs,
bi-directional RS232 digital communications, and two programmable
FORM C alarm relays. The Series H is supplied in bench-top, 19"
rack, and NEMA-4X/IP65 mounting configurations.
The Series H is part of the AFX® Series of ozone instrumentation
designed and manufactured by IN USA, Inc. in Needham, MA.
IN USA, Inc. is a recognized world leader in Ozone Instrumentation
and Control and offers a complete line of instruments for measurement
of ozone in air and liquid phases, including process ozone (high
concentrations), ambient ozone (low concentrations), stack gas
ozone (low concentrations), and dissolved ozone in water.
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