100 Morse Street Norwood, MA 02062, USA Toll free: 1-800-798-4029 Phone: (1) 781-444-2929 Fax: (1) 781-444-9229 E-mail: info@inusacorp.com
High Purity
Ozone Generator
The IN USA OG-5000 series (patent pending) of Ozone Generators is designed to produce ultra clean, high purity and very high concentration ozone gas that is ideal for a wide range of Semiconductor process applications.
Ozone gas is generated by exciting molecular oxygen in a high intensity electrical field, which is established by applying an alternating voltage between two electrodes. In order to obtain high intensity electrical fields the two electrode surfaces are placed in very close mechanical proximity. When the strength of the field integrated across the gap is larger than the breakdown voltage of the oxygen that fills the gap, discharges take place, and ozone is generated. The addition of ppm levels of a "doping" or "spiking" gas such as Nitrogen maximizes the ozone output and ensures a highly stable production of ozone over time.
The high purity wetted materials in the OG-5000 series, combined with an innovative cell design, unique sealing technique and a state of the art controller ensures the production of high purity and very high concentration ozone gas to meet the demanding requirements of all applications in the Semiconductor Industry.
Each of the ozone generators in the OG-5000 series is very compact and the modular design allows for the units to be configured to meet a wide range of applications and budget requirements. With its extensive built-in diagnostics, it is designed for demanding industrial continuous long-term applications and does not require any regular preventative maintenance or any consumables.
The OG-5000 series is available as a standalone ozone generator or as part of a complete turnkey custom designed ozone delivery system model ODS series as shown above.
Application:
Features:
Chemical
Vapor Deposition CVD
Atomic
Layer Deposition ALD
Oxide
growth
Surface
conditioning
Ashing
Wet
Processing
Particle
Cleaning
Photoresist
Removal
Epitaxy
High
Purity Ozone
Very
high ozone concentrations
Environmentally
friendlier than other process gases
Low
cost of ownership
No
consumables
Compact
and Modular
Proven
technology
For
more information on IN USA's ozone delivery systems, please
complete our Information
Request Form, or contact IN USA via e-mail or
phone.
