Ozone generators, Ozone analysis and destruct systems from InUSA Corp.

Ozone detector importance

Above certain concentration levels, ozone is a toxic and corrosive gas. Therefore, it is important to have an Ozone detector, which can check for ozone leaks in the workplace and measure ambient (TLV) ozone levels. An Ozone detector is typically used in areas around ozone generators, gas chambers, vent gas (post-destruct) systems, gas delivery systems, and inside semiconductor tools. In most of these environments an ozone detector is required in order to comply OSHA/TLV requirements.

Ozone detector products from IN USA

IN USA offers a complete line of ozone detector products to monitor ambient ozone and detect ozone leaks. We also offer a portable, battery-operated ozone detector that features a solid-state ozone sensor.

Some models employ a patented ratiometric ozone measurement technique that pinpoints the exact location of a leak in applications with several potential leak sources. All other models use the proven UV (ultraviolet) absorption technique to make the ozone detection. UV absorption is specific to ozone, provides fast, reliable and stable readings at the low end and requires no consumables

Ozone monitors from IN USA are able measure ozone in both gas and liquid phases from ppb levels to concentrations as high as 900 g/m3. Single-channel and multi-channel models are available.

Some ozone monitor models are designed for ozone measurement in ultrapure and deionized water (or other liquids) and can be installed in-line in a full-flow, single pass or recirculating stream. Other models are ideal for harsh and dirty applications such as wastewater or other liquids with large amounts of particulates. In this case, a side-stream measurement is ideal for sampling.

Ozone destruct systems

IN USA's advanced design ozone destruct systems eliminate excess ozone in off-gas produced in a wide variety of applications, including: semiconductor wafer manufacturing; municipal water; ultrapure water; wastewater treatment; corona treatment; and chemical processing.

IN USA's ozone destruct systems use a catalyst to decompose ozone to safe levels via the exothermic conversion of ozone (O3) to oxygen (O2). Our systems can handle inlet ozone concentrations from 1 to 20% by weight, and are designed to meet and exceed OSHA/TLV requirements to ensure workplace safety.

For special applications, IN USA can provide alternative ozone destruct systems, including thermal destruct units.

Dissolved Ozone detector

Whether the application involves the measurement of dissolved ozone in ultrapure water or in wastewater, IN USA has an ozone detector that meets any set of requirements. IN USA's dissolved ozone detector measures ozone from ppb levels up to 150 ppm or more. Some ozone detector models use IN USA's patented dual-path UV measurement technique, which has revolutionized ozone measurement by virtually eliminating the need for a reference measurement.

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