100 Morse Street Norwood, MA 02062, USA Toll free: 1-800-798-4029 Phone: (1) 781-444-2929 Fax: (1) 781-444-9229 E-mail: info@inusacorp.com
High Purity Ozone Gas or Water Delivery Systems
IN USA
offers several ozone delivery systems that are carefully designed
to meet the most stringent safety performance requirements while
delivering high purity ozone with very low cost of ownership.
These systems combine one or more ozone generators and servo-loop
control with IN USA's advanced ozone monitoring instrumentation
to provide a low-cost, turnkey system that can be customized to
meet your application requirements.
IN USA's Dissolved Ozone Delivery Systems offer high purity, bubble-free high concentration ozone for a wide range of semiconductor applications. The system is designed to provide dissolved ozone in water on demand, at the point of use for multi-bath applications.
Typical ozone delivery system features include:
Compact
size( 40''H x 24"W x 31"D)
One
or more ozone generators
Continuous
ozone output indication and control
Interface
with host tool capability
Built-in
safety monitoring subsystem and interlocks
VCR
fittings
Cooling
water leak detector for safe operation
Extensive
diagnostics
EMO
Free-standing
rack cabinet enclosure
Low
cost of ownership
For more information on IN USA's ozone delivery systems,
please complete our Information Request
Form, or contact IN USA via e-mail
or phone.
