100 Morse Street Norwood, MA 02062, USA Toll free: 1-800-798-4029 Phone: (1) 781-444-2929 Fax: (1) 781-444-9229 E-mail: info@inusacorp.com
Opti
Sense 5000
Opti
Sense 5000 (rear view)
IN USA's
OPTISENSE 5000 uses non-dispersive infrared absorption technology
to accurately detect the end of a chamber cleaning cycle.
Wafer processing chambers are typically cleaned every cycle using a reactive gas like fluorine or chlorine. It is critical to know exactly when to stop the chamber cleaning cycle to prevent it from being damaged. Under-cleaning the chamber adversely affects the wafers and leads to increased wafer scrap.
Typical product features include:
Compact and no moving parts
Non dispersive Infra-red technology
Real time graphical user interface
Fast response time
Analog and digital outputs
The OPTI-Sense
5000 extends the life of the chamber and also increases efficiency
by saving time and maximizing yield. It also optimizes the use
of expensive reactive gases that are employed in cleaning and
extends the life of chamber consumables.
