Ozone generators, Ozone  analysis and destruct systems from InUSA Corp.


Deionized water and Ozone Treatment

Uses of deionized water

Water (H2O) is the most prevalently used material in micro fabrication processes, and is used mainly for rinsing and cleaning of wafers. Most commonly it is necessary to use deionized water. In order to achieve the quality and purity levels required by modern micro fabrication processes deionized water must be manufactured on site. It usually takes 4-6 gallons of raw tap water to produce one gallon of deionized water acceptable for use in micro fabrication. It is import that deionized water is continuously re-circulated in order to achieve the quality and purity levels. It is also important that purity is continually monitored.

IN USA is a leading manufacturer of Ozone (O3) monitoring and control instrumentation for a wide range of applications and markets such as the treatment and production of deionized water.IN USA offers a complete line of ozone analyzers, monitors, sensors, and controllers for gas- and liquid-phase measurement as well as ozone delivery and destruct systems. Our instruments are ideal for:

  • Ozone safety (TLV) and leak detection
  • Generator output monitoring
  • Off-gas or vent gas monitoring
  • Dissolved ozone measurement
  • Deionized water treatment

Ozone meters for processing of deionized water

IN USA manufactures ozone meters, which are able measure ozone in both gas and liquid phases such as those in the processing of deionized water. Our ozone meters concentrations ranging from ppb levels to as high as 900 g/m3. Single-channel and multi-channel models are available - all models use the proven UV (ultraviolet) absorption technique to make the measurement. UV absorption is an absolute measurement, is selective to ozone, and provides a fast, reliable and stable indication of ozone concentration. The EPA, ASTM, NIST, and IOA recognize this technique as the reference method for ozone in air measurements.

Some ozone meter models are designed for ozone measurement in ultra pure and deionized water (or other liquids) and can be installed in-line in a full-flow, single pass or a re-circulating stream such as those necessary for the production of deionized water. Other models are ideal for harsh and dirty applications such as wastewater or other liquids with large amounts of particulates. In this case, a side-stream measurement is ideal for sampling.

Dissolved ozone meters

Whether the application involves the measurement of dissolved ozone in ultra pure deionized water or in wastewater, IN USA has several dissolved ozone analyzers to meet the requirements. IN USA's dissolved ozone analyzers measure ozone from ppb levels up to 150 ppm or more. Some models use IN USA's patented dual-path UV measurement technique, which has revolutionized ozone measurement by virtually eliminating the need for a reference measurement.

For more information on IN USA's ozone generators, please complete our Information Request Form, or contact IN USA via e-mail or phone.

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Teledyne Instruments, Inc.
9970 Carroll Canyon Road,
San Diego, CA 92131, USA
Toll free: 1-800-798-4029
Phone: (1) 781-444-2929
E-mail: api-sales@teledyne.com