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Water cooled ozone generators for semiconductor, Commercial ozone generator Industrial Ozone generators, analyzers, monitors, Commercial Ozone generators, ozone monitoring


Teledyne Instruments, Inc.
9970 Carroll Canyon Road,
San Diego, CA 92131, USA
Toll free: 1-800-798-4029
Phone: (1) 781-444-2929
E-mail: api-sales@teledyne.com

Air cooled ozone generators Water cooled ozone generators
Methyl Iodide AnalyzerHydrogen Peroxide
 
 
Water Cooled Ozone generators     
 
The IN USA OG-5000 series (patent pending) of Ozone Generators is designed to produce ultra clean, high purity and very high concentration ozone gas that is ideal for a wide range of Semiconductor process applications.

The OG-5000 Ozone generators produce Ozone gas by exciting molecular oxygen in a high intensity electrical field, which is established by applying an alternating voltage between two electrodes. In order to obtain high intensity electrical fields the two electrode surfaces are placed in very close mechanical proximity. When the strength of the field integrated across the gap is larger than the breakdown voltage of the oxygen that fills the gap, discharges take place, and ozone is generated. The addition of ppm levels of a "doping" or "spiking" gas such as Nitrogen maximizes the ozone output and ensures a highly stable production of ozone over time.

The high purity wetted materials in the OG-5000 Ozone generators series, combined with an innovative cell design, unique sealing technique and a state of the art controller ensures the production of high purity and very high concentration ozone gas to meet the demanding requirements of all applications in the Semiconductor Industry.

Each of the ozone generators in the OG-5000 series is very compact and the modular design allows for the units to be configured to meet a wide range of applications and budget requirements. With its extensive built-in diagnostics, it is designed for demanding industrial continuous long-term applications and does not require any regular preventative maintenance or any consumables.

The OG-5000 Ozone generators series is available as a standalone ozone generator or as part of a complete turnkey custom designed ozone delivery system model ODS series as shown above.
         
  Application:   Features:
 
Chemical Vapor Deposition CVD
Atomic Layer Deposition ALD
Oxide growth
Surface conditioning
Ashing
Wet Processing
Particle Cleaning
Photoresist Removal
Epitaxy
   
 
High Purity Ozone
Very high ozone concentrations
Environmentally friendlier than other process gases
Low cost of ownership
No consumables
Compact and Modular
Proven technology
   
For more information on IN USA's ozone delivery systems, please complete our Information Request Form, or contact IN USA via e-mail or phone.

 

 
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